Tris(dimethylamino)silane

製品名 Tris(dimethylamino)silane
類義語 BRN 1901643; N,N,N',N',N'',N''-Hexamethylsilanetriamine; Silanetriamine, N,N,N',N',N'',N''-hexamethyl-; tris(dimethylamino)silyl
分子式 C6H18N3Si
分子量 160.3127
InChI InChI=1/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3
CAS登録番号 15112-89-7
EINECSに 239-165-0
分子構造 15112-89-7 Tris(dimethylamino)silane
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